05/31/2017 00:00 Metek uSonic3 Scientific (SN: 0109066044)
0000233 M:x =       y =       z =       t =      
0000253 E:invalid data (040)
0001031 M:x =       y =       z =       t =      
0001052 E:invalid data (050)
0001833 M:x =       y =       z =       t =      
0001852 E:invalid data (040)
0002634 M:x =!      y =       z =       t =      
0002652 E:invalid data (040)
0003432 M:x =       y =       z =       t =      
0003450 E:invalid data (050)
0004230 M:x =       y =       z =       t =      
0004250 E:invalid data (040)
0005030 M:x =       y =       z =       t =      
0005052 E:invalid data (040)
0005829 M:x =       y =       z =       t =      
0005850 E:invalid data (040)
0006631 M:x =       y =       z =       t =      
0006651 E:invalid data (040)
0007431 M:x =       y =       z =       t =      
0007450 E:invalid data (040)
0008230 M:x =       y =       z =       t =      
0008252 E:invalid data (040)
0009031 M:x =       y =       z =       t =      
0009050 E:invalid data (040)
0009829 M:x =       y =       z =       t =      
0009850 E:invalid data (040)
0010631 M:x =       y =       z =       t =      
0010650 E:invalid data (040)
0011432 M:x =       y =       z =       t =      
0011451 E:invalid data (040)
0012230 M:x =       y =       z =       t =      
0012248 E:invalid data (040)
0013030 M:x =       y =       z =       t =      
0013048 E:invalid data (040)
0013829 M:x =       y =       z =       t =      
0013850 E:invalid data (040)
0014629 M:x =       y =       z =       t =      
0014649 E:invalid data (040)
0015429 M:x =       y =       z =       t =      
0015449 E:invalid data (040)
0016229 M:x =       y =       z =       t =      
0016251 E:invalid data (040)
0017029 M:x =       y =       z =       t =      
0017050 E:invalid data (040)
0017829 M:x =       y =       z =       t =      
0017849 E:invalid data (040)
0018630 M:x =       y =       z =       t =      
0018649 E:invalid data (040)
0019429 M:x =       y =       z =       t =      
0019448 E:invalid data (040)
0020230 M:x =       y =       z =       t =      
0020249 E:invalid data (040)
0021029 M:x =       y =       z =       t =      
0021048 E:invalid data (040)
0021828 M:x =       y =       z =       t =      
0021849 E:invalid data (040)
0022627 M:x =       y =       z =       t =      
0022648 E:invalid data (040)
0023427 M:x =       y =       z =       t =      
0023447 E:invalid data (040)
0024229 M:x =       y =       z =       t =      
0024247 E:invalid data (040)
0025027 M:x =       y =       z =       t =      
0025049 E:invalid data (040)
0025827 M:x =       y =       z =       t =      
0025848 E:invalid data (040)
0026627 M:x =       y =       z =       t =      
0026647 E:invalid data (050)
0027428 M:x =       y =       z =       t =      
0027447 E:invalid data (040)
0028227 M:x =       y =       z =       t =      
0028247 E:invalid data (040)
0029028 M:x =       y =       z =       t =      
0029047 E:invalid data (040)
0029827 M:x =       y =       z =       t =      
0029846 E:invalid data (040)
0030626 M:x =       y =       z =       t =      
0030647 E:invalid data (040)
0031426 M:x =       y =       z =       t =      
0031448 E:invalid data (050)
0032225 M:x =       y =       z =       t =      
0032246 E:invalid data (040)
0033027 M:x =       y =       z =       t =      
0033047 E:invalid data (040)
0033826 M:x =       y =       z =       t =      
0033848 E:invalid data (040)
0034626 M:x =       y =       z =       t =      
0034646 E:invalid data (140)
0035427 M:x =       y =       z =       t =      
0035445 E:invalid data (040)